JPH0226230U - - Google Patents
Info
- Publication number
- JPH0226230U JPH0226230U JP10523488U JP10523488U JPH0226230U JP H0226230 U JPH0226230 U JP H0226230U JP 10523488 U JP10523488 U JP 10523488U JP 10523488 U JP10523488 U JP 10523488U JP H0226230 U JPH0226230 U JP H0226230U
- Authority
- JP
- Japan
- Prior art keywords
- support rod
- semiconductor substrate
- supports
- hot air
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10523488U JPH0226230U (en]) | 1988-08-09 | 1988-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10523488U JPH0226230U (en]) | 1988-08-09 | 1988-08-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0226230U true JPH0226230U (en]) | 1990-02-21 |
Family
ID=31337664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10523488U Pending JPH0226230U (en]) | 1988-08-09 | 1988-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0226230U (en]) |
-
1988
- 1988-08-09 JP JP10523488U patent/JPH0226230U/ja active Pending